Silicon Nitride

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What is Silicon nitride?

Si3N4 is characterized by high creep, oxidation and high temperature resistance, low coefficients of thermal expansion, which is related to the good resistence to thermal shocks. WaferExport provides the best Silicon nitride (SN) Wafers .

We offer SI3N4 in three varietes: Hot Pressed SN (HPSN), Reaction Bonded SN (RBSN) and Sintered SN (SSN).

  • LPCVD (Low Pressure Chemical Vapor Deposition) –  coatings are characterized by low thermal conductivity, cleanliness and repeatability of deposition.
  • PECVD (Plasma-Enhanced Chemical Vapor Deposition)  –  coatings are growing faster, which causes them to be thicker in comparison to LPCVD method.

Silicon nitride wafer specification

Thickness rangeup to 1.3 µm
Thickness tolerance+/-5%
Surface finishingdouble/single sided polishing
Diameter ranging2”,3”,4”,6”,8”,12″
Typesstandard and low stress
Refractive index1.46-2.0

For more information about silicon nitride wafers contact us!

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